GT SCR
GT STEP5
GT REVERSE
GT C/S
Controller
PCB
Fan
Sensor
Power Supply
Valve
Driver
Motor
Monitor
ASSY
Pump
Other
Manifold
Panel
DC Power
Gasket
Motor
Power
Monitor
Pump
Filter
Cable
Valve
Controller
Match
Chamber
Power Supply
Frame
Other
PCB
Valve
Cable
HEAD
Electrode
SiC
Cylinder
Manometer
Box
Power
RF Generator
Ceramic
SiC
Controller
Controller
HEAD
Power
Other
ASSY
Valve
Switch
Cylinder
Valve
RF Generator
HEAD
Heat exchanger
Power
RF Generator
Main body
Controller
Cable
Electrode
Valve
PCB
Valve
Controller
Match
Other
PCB
Chamber
Cable
Power Supply
Cable
Other
RF Generator
Controller
Power Supply
RF Generator
Valve
Match
Other
Other
Motor
PCB
MFC Mass Flow Controller
PCB
Chamber
Other
Pump
Electrode
Cable
Ceramic
Electrode
Cable
PCB
Other
PCB
Cable
PCB
PCB
PCB
WLDMNT
Electrode
Gate
Match
Filter
Other
Switch
Cylinder
Gaskets
SiC
WLDMNT
QUARTZ
Elevator
Match
O-Ring
Valve
PCB
Frame
Assembly
Power Supply
Detector
Power Supply
HEAD
AC Power
Power Supply
Power Supply
Manometer
Controller
Manometer
Valve
Filter
Valve
Filter
Manometer
Switch
Lifter
Box
Other
Other
Controller
Controller
Controller
Controller
RF Generator
WLDMNT
Ceramic
Pump
Pump
直入式HN2 - Direct puffing HN2
溫控器 - Temperature controller
氣體管路加熱帶 - Gas line heater jacket
真空管路加熱帶 - (Vacuum pipe heater jacket)
直入式HN2控制箱 - (Direct puffing AC box)
傳統式溫度控制箱 - (Traditional temperature control box)
人機界面控制箱 - (HMI AC box)
分電盤 - (Power distributor)
四通+彎頭 - (Four-way + Elbow)
三層式QSV - (Three-layer QSV)
GT SMIF
GT MAIN ARM